EUV: Extreme Ultraviolet Lithography - Semiconductor …
https://semiengineering.com/knowledge_centers/manufacturing/lithography/euv/
WebOct 5, 2021 · Extreme ultraviolet (EUV) lithography is a soft X-ray technology, which has a wavelength of 13.5nm. Today’s EUV scanners enable resolutions down to 22nm half-pitch. In a system, an EUV light source makes use of a high power laser to create a plasma. This, in turn, helps emit a short wavelength light inside a vacuum chamber.
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